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High-Speed Epitaxial Growth of β-SiC Film on Si(111) Single Crystal by Laser Chemical Vapor Deposition

✍ Scribed by Song Zhang; Rong Tu; Takashi Goto

Book ID: 114766113
Publisher: John Wiley and Sons
Year: 2012
Tongue: English
Weight: 413 KB
Volume: 95
Category: Article
ISSN: 0002-7820
DOI: 10.1111/j.1551-2916.2012.05354.x

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