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High-speed deposition of Y–Si–O films by laser chemical vapor deposition using Nd:YAG laser

✍ Scribed by Akihiko Ito; Jun Endo; Teiichi Kimura; Takashi Goto

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
521 KB
Volume
204
Category
Article
ISSN
0257-8972

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