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High-resolution electron beam lithography for the fabrication of high-density dielectric metamaterials

✍ Scribed by W. Zhang; A. Potts; D.M. Bagnall; B.R. Davidson

Book ID: 108289474
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 594 KB
Volume: 515
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2006.09.011

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