✦ LIBER ✦
High-resolution electron-beam lithography for fabricating visible semiconductor lasers with curved mirrors and integrated holograms
✍ Scribed by P. Unger; V. Boegli; P. Buchmann; R. Germann
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 395 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0167-9317
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