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High resolution deep level transient spectroscopy studies of the vacancy-oxygen and related defects in ion-implanted silicon

✍ Scribed by Evans-Freeman, J. H.; Kan, P. Y. Y.; Abdelgader, N.


Book ID
121329021
Publisher
American Institute of Physics
Year
2002
Tongue
English
Weight
249 KB
Volume
92
Category
Article
ISSN
0021-8979

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