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High-Density Plasma Etching of Iridium Thin Films in a Cl[sub 2]/O[sub 2]/Ar Plasma

✍ Scribed by Chung, Chee Won; Kim, Hye In; Song, Young Soo

Book ID: 126603793
Publisher: The Electrochemical Society
Year: 2003
Tongue: English
Weight: 176 KB
Volume: 150
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.1562935

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