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High concentration Mn ion implantation in Si

✍ Scribed by Nianhua Peng; Christopher Jeynes; Melanie J. Bailey; Damitha Adikaari; Vlad Stolojan; Roger P. Webb


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
243 KB
Volume
267
Category
Article
ISSN
0168-583X

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