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ion implantation in strained-Si/SiGe/Si hetero-structures

✍ Scribed by J. Morioka; S. Irieda; Y. Ishidoya; T. Inada; N. Sugii

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 176 KB
Volume: 242
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.08.117

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