✦ LIBER ✦

Strain-driven defect evolution in Sn+ implanted Si/SiGe multilayer structure

✍ Scribed by P.I. Gaiduk; A. Nylandsted Larsen; W. Wesch

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

ion implantation in strained-Si/SiGe/Si

✍ J. Morioka; S. Irieda; Y. Ishidoya; T. Inada; N. Sugii 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 176 KB

Characterization of As+ ion-implanted la

✍ T Ishida; S Irieda; T Inada; N Sugii 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 226 KB