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Hard-hydrogenated tetrahedral amorphous carbon films by distributed electron cyclotron resonance plasma

✍ Scribed by F. Piazza

Book ID: 113656261
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 314 KB
Volume: 24
Category: Article
ISSN: 0263-4368
DOI: 10.1016/j.ijrmhm.2005.07.004

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