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H2-based dry plasma etching for mesa structuring of HgCdTe

✍ Scribed by E. P. G. Smith; C. A. Musca; D. A. Redfern; J. M. Dell; L. Faraone

Book ID: 107452576
Publisher: Springer US
Year: 2000
Tongue: English
Weight: 562 KB
Volume: 29
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-000-0237-7

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