Dry etched mesas for buried heterostructure InGaAsP/InP lasers using electron cyclotron resonance Cl2/CH4/H2/Ar discharges

✍ Scribed by S. J. Pearton; W. S. Hobson; F. Ren; C. R. Abernathy; C. Constantine

• Book ID: 105114587
• Publisher: Springer US
• Year: 1994
• Tongue: English
• Weight: 533 KB
• Volume: 5
• Category: Article
• ISSN: 0957-4522
• DOI: 10.1007/bf01198952