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Growth temperature and plasma power effects on N incorporation in InSbN grown by molecular beam epitaxy

✍ Scribed by K. P. Lim; H. T. Pham; S. F. Yoon; A. Markwitz; N. Yakovlev


Book ID
112182885
Publisher
John Wiley and Sons
Year
2009
Tongue
English
Weight
346 KB
Volume
3
Category
Article
ISSN
1862-6254

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We report the effects of plasma species on the N incorporation of GaAsSbN. Optical emission spectroscopy and quadruple mass spectroscopy were used to characterize the plasma source. We found a simple correlation between the atomic N species and meta-stable molecular N 2 \* species that is independen