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Nitrogen isotopic effect in Ga15N epifilms grown by plasma-assisted molecular-beam epitaxy

โœ Scribed by Yong-zhao Yao; Takeshi Ohgaki; Naoki Fukata; Yutaka Adachi; Yoshiki Wada; Hajime Haneda; Naoki Ohashi


Book ID
113898259
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
308 KB
Volume
62
Category
Article
ISSN
1359-6462

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Effects of plasma species on the N incor
โœ Ta-Chun Ma; Yan-Ting Lin; Hao-Hsiung Lin ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 234 KB

We report the effects of plasma species on the N incorporation of GaAsSbN. Optical emission spectroscopy and quadruple mass spectroscopy were used to characterize the plasma source. We found a simple correlation between the atomic N species and meta-stable molecular N 2 \* species that is independen