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Growth of strained Si on He ion implanted Si/SiGe heterostructures

✍ Scribed by D. Buca; S.F. Feste; B. Holländer; S. Mantl; R. Loo; M. Caymax; R. Carius; H. Schaefer


Book ID
108269513
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
333 KB
Volume
50
Category
Article
ISSN
0038-1101

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