Monitoring interstitial fluxes by self-assembled nanovoids in ion-implanted Si/SiGe/Si strained structures

✍ Scribed by P.I. Gaiduk; J. Lundsgaard Hansen; A. Nylandsted Larsen

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 195 KB
• Volume: 230
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2004.12.043