Growth of strained Si on He ion implante
✍
D. Buca; S.F. Feste; B. Holländer; S. Mantl; R. Loo; M. Caymax; R. Carius; H. Sc
📂
Article
📅
2006
🏛
Elsevier Science
🌐
English
⚖ 333 KB