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Strain relaxation in nano-patterned strained-Si/SiGe heterostructure on insulator

✍ Scribed by XuYan Liu; WeiLi Liu; XiaoBo Ma; ShiLong Lv; ZhiTang Song; ChengLu Lin

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 364 KB
Volume: 256
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2009.12.063

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