Strain evaluation of strained-Si layers on SiGe by the nano-beam electron diffraction (NBD) method

✍ Scribed by Koji Usuda; Toshinori Numata; Shinichi Takagi

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 394 KB
• Volume: 8
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2004.09.105