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Growth of amorphous hydrogenated carbon nitride films in radio-frequency plasma

✍ Scribed by Zhang, Mei; Nakayama, Yoshikazu; Miyazaki, Tsutomu; Kume, Masato

Book ID: 120166618
Publisher: American Institute of Physics
Year: 1999
Tongue: English
Weight: 337 KB
Volume: 85
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.369055

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