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Growth kinetics and reaction mechanism of silicon chemical vapour deposition from silane

✍ Scribed by Meng Tao

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 931 KB
Volume: 223
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90522-q

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