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On chemical kinetics of silicon deposition from silane (I). The first order chemical reaction

✍ Scribed by Dr. H. Kühne

Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
497 KB
Volume
25
Category
Article
ISSN
0232-1300

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📜 SIMILAR VOLUMES

On Chemical Kinetics of Silicon Depositi
On Chemical Kinetics of Silicon Deposition from Silane (V) The Effect of Hydrogen Formation
✍ Dr. sc. H. Kühne 📂 Article 📅 1991 🏛 John Wiley and Sons 🌐 English ⚖ 414 KB

In consequence of hydrogen formation during silane pyrolysis total gas volume increases, when the reaction proceeds at constant total pressure. Any mole of silane decomposed produces two moles of hydrogen. In the present paper expressions are derived for 1' ' and 0.5Ih reaction order describing axia