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On Chemical Kinetics of Silicon Deposition from Silane (VI). The Effect of Wafer Diameter

✍ Scribed by Dr. sc. H. Kühne; H. Harnisch; P. Puk

Publisher: John Wiley and Sons
Year: 1991
Tongue: English
Weight: 430 KB
Volume: 26
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.2170260818

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