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On chemical kinetics of silicon deposition from silane (II). Comparing 1st- and 0.5th-reaction order

✍ Scribed by Dr. H. Kühne

Publisher: John Wiley and Sons
Year: 1990
Tongue: English
Weight: 439 KB
Volume: 25
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.2170250711

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📜 SIMILAR VOLUMES

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