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Growth chemistry of SiC alloys from SiF4–CH4 plasmas

✍ Scribed by G. Cicala; P. Capezzuto; G. Bruno; M.C. Rossi

Book ID: 108417574
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 121 KB
Volume: 184
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(01)00665-1

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