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Quadrupole mass spectrometric study of positive ions from RF plasmas of pure CH4, CH4/H2, and CH4/Ar systems

✍ Scribed by Wei Zhang; Yves Catherine

Publisher: Springer
Year: 1991
Tongue: English
Weight: 585 KB
Volume: 11
Category: Article
ISSN: 0272-4324
DOI: 10.1007/bf01447160

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