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Thermodynamic study on codeposition of ZrC-SiC from MTS-ZrCl4-CH4-H2

✍ Scribed by Q. M. Liu; L. T. Zhang; J. Liu; Y. G. Wang

Book ID: 110166864
Publisher: SP MAIK Nauka/Interperiodica
Year: 2010
Tongue: English
Weight: 286 KB
Volume: 46
Category: Article
ISSN: 0020-1685
DOI: 10.1134/s0020168510100110

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