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Thermodynamic study on co-deposition of ZrB2–SiC from ZrCl4–BCl3–CH3SiCl3–H2–Ar system

✍ Scribed by Juanli Deng; Laifei Cheng; Guopeng Zheng; Kehe Su; Litong Zhang

No coin nor oath required. For personal study only.

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