Experimental kinetic study of the chemical vapour deposition of SiC-based ceramics from CH3SiCl3H2 gas precursor

✍ Scribed by F. Loumagne; F. Langlais; R. Naslain

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 498 KB
• Volume: 155
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(95)00180-8