✦ LIBER ✦

Kinetic and Microstructure of SiC Deposited from SiCl4-CH4-H2

✍ Scribed by Yan YANG; Weigang ZHANG

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Oxidation kinetics of SiC deposited from

✍ L. Filipuzzi; R. Naslain; C. Jaussaud 📂 Article 📅 1992 🏛 Springer 🌐 English ⚖ 726 KB

Preparation of SiC foams by CVI-R techni

✍ Yu Yang; Quangui Guo; Jingli Shi; Lang Liu 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 778 KB

Thermodynamic study on co-deposition of

✍ Juanli Deng; Laifei Cheng; Guopeng Zheng; Kehe Su; Litong Zhang 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 728 KB

Decomposition of SiCl4and deposition of

✍ R. Manory; R. Avni; A. Grill 📂 Article 📅 1987 🏛 Springer 🌐 English ⚖ 529 KB

Experimental kinetic study of the chemic

✍ F. Loumagne; F. Langlais; R. Naslain 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 498 KB

R.f. plasma deposition of amorphous sili

✍ Giovanni Bruno; Pio Capezzuto; Francesco Cramarossa; Riccardo D'Agostino 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 230 KB