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Growth and properties of GaN on Si (111) substrates with AlGaN/AlN buffer layer by NH3-GSMBE

โœ Scribed by Zhang, N H; Wang, X L; Zeng, Y P; Xiao, H L; Wang, J X; Liu, H X; Li, J M


Book ID
115465352
Publisher
Institute of Physics
Year
2005
Tongue
English
Weight
412 KB
Volume
38
Category
Article
ISSN
0022-3727

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High Quality GaN Layers on Si(111) Subst
โœ Hageman, P.R. ;Haffouz, S. ;Kirilyuk, V. ;Grzegorczyk, A. ;Larsen, P.K. ๐Ÿ“‚ Article ๐Ÿ“… 2001 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 91 KB ๐Ÿ‘ 2 views

We present a study on the material properties of GaN films grown on (111) silicon substrates by low-pressure metalorganic chemical vapour deposition using AlN buffer layers. This buffer layer is optimised with respect to growth temperature and time for the optical and structural properties of the Ga