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Growth and characterization of boron carbon nitride films with low dielectric constant

✍ Scribed by Tai, Tomoyoshi; Sugiyama, Tomohiko; Sugino, Takashi

Book ID: 123149173
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 144 KB
Volume: 12
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(02)00344-8

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