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Structure characterization of carbon and fluorine-doped silicon oxide films with low dielectric constant

✍ Scribed by Shi-Jin Ding; Li Chen; Xin-Gong Wan; Peng-Fei Wang; Jian-Yun Zhang; David Wei Zhang; Ji-Tao Wang

Book ID: 114192666
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 147 KB
Volume: 71
Category: Article
ISSN: 0254-0584
DOI: 10.1016/s0254-0584(00)00530-7

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