✦ LIBER ✦
Study of the material properties and suitability of plasma-deposited fluorine-doped silicon dioxides for low dielectric constant interlevel dielectrics
✍ Scribed by V.L. Shannon; M.Z. Karim
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 497 KB
- Volume
- 270
- Category
- Article
- ISSN
- 0040-6090
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