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Effects of porous carbon additives and induced fluorine on low dielectric constant polyimide synthesized with an e-beam

✍ Scribed by Ji Sun Im; Tae-Sung Bae; Sung Kyu Lee; Sei-Hyun Lee; Euigyung Jeong; Phil Hyun Kang; Young-Seak Lee


Book ID
113787094
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
605 KB
Volume
45
Category
Article
ISSN
0025-5408

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