✦ LIBER ✦

Dielectric constant and stability of fluorine doped PECVD silicon oxide thin films

✍ Scribed by S Mizuno; A Verma; H Tran; P Lee; B Nguyen

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Improved gap-filling capability of fluor

✍ Shinsuke Mizuno; Amrita Verma; Peter Lee; Bang Nguyen 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 687 KB

Structure characterization of carbon and

✍ Shi-Jin Ding; Li Chen; Xin-Gong Wan; Peng-Fei Wang; Jian-Yun Zhang; David Wei Zh 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 147 KB

Temperature accelerated dielectric break

✍ H. Zhou; F.G. Shi; B. Zhao; J. Yota 📂 Article 📅 2005 🏛 Springer 🌐 English ⚖ 488 KB

Thickness dependent dielectric breakdown

✍ H. Zhou; F.G. Shi; B. Zhao 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 245 KB

Investigation of simultaneous fluorine a

✍ S. Altshuler; Y. Chakk; A. Rozenblat; A. Cohen 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 208 KB

Physical properties of transparent and c

✍ S.S. Shinde; P.S. Shinde; S.M. Pawar; A.V. Moholkar; C.H. Bhosale; K.Y. Rajpure 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 803 KB