✦ LIBER ✦
Improved gap-filling capability of fluorine-doped PECVD silicon oxide thin films
✍ Scribed by Shinsuke Mizuno; Amrita Verma; Peter Lee; Bang Nguyen
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 687 KB
- Volume
- 279
- Category
- Article
- ISSN
- 0040-6090
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