✦ LIBER ✦

Boron carbon nitride film with low dielectric constant as passivation film for high speed electronic devices

✍ Scribed by Umeda, Shuichi; Yuki, Tadao; Sugiyama, Tomohiko; Sugino, Takashi

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Characterization of boron carbon nitride

✍ Etou, Yoshihiro; Tai, Tomoyoshi; Sugiyama, Tomohiko; Sugino, Takashi 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 520 KB

Growth and characterization of boron car

✍ Tai, Tomoyoshi; Sugiyama, Tomohiko; Sugino, Takashi 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 144 KB

High resistivity and low dielectric cons

✍ Aono, Masami; Nitta, Shoji 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 186 KB

Synthesis of boron nitride film with low

✍ Sugino, Takashi; Tai, Tomoyoshi; Etou, Yoshihiro 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 109 KB