✦ LIBER ✦
High resistivity and low dielectric constant amorphous carbon nitride films: application to low-k materials for ULSI
✍ Scribed by Aono, Masami; Nitta, Shoji
- Book ID
- 123196301
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 186 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0925-9635
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