Synthesis of boron nitride film with low dielectric constant for its application to silicon ultralarge scale integrated semiconductors

✍ Scribed by Sugino, Takashi; Tai, Tomoyoshi; Etou, Yoshihiro

• Book ID: 120651099
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 109 KB
• Volume: 10
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/S0925-9635(00)00559-8