✦ LIBER ✦
A method for the measurement of thin film optical constants with a spectral photometer from 230 nm to 850 nm and its application to plasma silicon (oxy) nitride
✍ Scribed by R. Brendel; R. Ziegler; R. Hezel
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 665 KB
- Volume
- 200
- Category
- Article
- ISSN
- 0040-6090
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