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Characterization of boron carbon nitride films with a low dielectric constant

โœ Scribed by Etou, Yoshihiro; Tai, Tomoyoshi; Sugiyama, Tomohiko; Sugino, Takashi

Book ID
122066058
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
520 KB
Volume
11
Category
Article
ISSN
0925-9635

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๐Ÿ“œ SIMILAR VOLUMES

Characterization of low dielectric const
Characterization of low dielectric constant amorphous carbon nitride films
โœ M Aono; S Nitta; T Katsuno; T Itoh; S Nonomura ๐Ÿ“‚ Article ๐Ÿ“… 2000 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 154 KB

## ลฝ . Amorphous carbon nitride a-CN films have rather high resistivity and low dielectric constants that could be applied as x low dielectric constant materials. Several properties of a-CN films including interactions with metal electrodes are studied x and discussed using data from the frequency