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Influence of the methyl group on the dielectric constant of boron carbon nitride films containing it

✍ Scribed by Aoki, Hidemitsu; Masuzumi, Takuro; Hara, Makoto; Lu, Zhiming; Watanebe, Daisuke; Kimura, Chiharu; Sugino, Takashi


Book ID
122966004
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
551 KB
Volume
19
Category
Article
ISSN
0925-9635

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