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Influence of ions energy on the bonding structure of amorphous carbon nitride films

✍ Scribed by Aixiang Wei; Dihu Chen; Youguo Zhou; Peixing Lin; Zenghong Yang; Jiahai Fan

Book ID
114192634
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
180 KB
Volume
70
Category
Article
ISSN
0254-0584

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