Influence of ion energy on the surface morphology of tetrahedral amorphous carbon films

✍ Scribed by Z. Y. Chen; J. P. Zhao; Y. H. Yu; X. Wang; S. Q. Yang; T. S. Shi; X. H. Liu; E. Z. Luo; J. B. Xu; I. H. Wilson

• Book ID: 110236162
• Publisher: Springer
• Year: 1998
• Tongue: English
• Weight: 324 KB
• Volume: 17
• Category: Article
• ISSN: 0261-8028
• DOI: 10.1023/a:1006502210376