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Effect of heavy ion implantation on the properties of tetrahedral amorphous carbon film

โœ Scribed by J.R Shi; Z Sun; X Shi; S.P Lau; B.K Tay; J Pelzl


Book ID
114085278
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
206 KB
Volume
377-378
Category
Article
ISSN
0040-6090

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