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Gas temperature measurement in CF[sub 4], SF[sub 6], O[sub 2], Cl[sub 2], and HBr inductively coupled plasmas

✍ Scribed by G. Cunge; R. Ramos; D. Vempaire; M. Touzeau; M. Neijbauer; N. Sadeghi

No coin nor oath required. For personal study only.

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