✦ LIBER ✦
Model-Based Analysis of Plasma Parameters and Active Species Kinetics in Cl[sub 2]∕X (X=Ar, He, N[sub 2]) Inductively Coupled Plasmas
✍ Scribed by Efremov, Alexander; Min, Nam-Ki; Choi, Bok-Gil; Baek, Kyu-Ha; Kwon, Kwang-Ho
- Book ID
- 121721135
- Publisher
- The Electrochemical Society
- Year
- 2008
- Tongue
- English
- Weight
- 185 KB
- Volume
- 155
- Category
- Article
- ISSN
- 0013-4651
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