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Formation of silver nanoparticles in thin oxide layer on Si by negative-ion implantation

✍ Scribed by N. Arai; H. Tsuji; M. Motono; Y. Gotoh; K. Adachi; H. Kotaki; J. Ishikawa

Book ID: 114167133
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 238 KB
Volume: 206
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(03)00801-2

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