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Formation of high-quality and relaxed SiGe buffer layer with H-implantation and subsequent thermal annealing

✍ Scribed by K.F. Liao; P.S. Chen; S.W. Lee; L.J. Chen; C.W. Liu


Book ID
103860260
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
404 KB
Volume
237
Category
Article
ISSN
0168-583X

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